The boron nitride (BN) evaporation boat is a high-performance component crafted from high-purity hexagonal boron nitride ceramics. Typically manufactured in a boat shape—or customized to specific requirements—it serves as a stable container for various evaporation materials. In operation, it not only holds molten substances securely but also preserves the cleanliness and stability of the working environment. Unlike conventional ceramic vessels, BN evaporation boats combine structural strength with exceptional chemical inertness, allowing reliable long-term use under extreme conditions.
Material Advantages and Technical Highlights
1. Core Material: High-Purity Hexagonal Boron Nitride
The use of high-purity h-BN ensures that no impurities precipitate during high-temperature operation, effectively preventing contamination of evaporated materials. This enables the production of ultra-pure, high-performance thin films, meeting the stringent quality standards required in semiconductor fabrication, optical coatings, and other precision industries.
Key Material Properties of h-BN (“White Graphite”)
- High-temperature stability: Can operate in air up to approximately 900 °C, and withstand temperatures exceeding 2000 °C in vacuum or inert atmospheres.
- Chemical inertness: Resistant to reactions with most molten metals, semiconductor materials, glass, and reactive gases.
- Non-wetting, non-stick surface: Molten materials bead up on the surface, enabling near-complete evaporation with minimal residue. This improves material utilization and simplifies cleaning.
- Thermal shock resistance and insulation: Maintains structural integrity under repeated heating and cooling cycles; provides excellent high-temperature insulation for various heating methods.
Compared with graphite or metal evaporation vessels, BN boats offer superior chemical and thermal stability, corrosion resistance, and reduced material residue. These properties enhance evaporation efficiency, extend service life, and ensure consistent, reliable process results.
2. Key Manufacturing Process: Vacuum Hot Press Sintering
This technique densifies BN powder uniformly under high temperature and pressure, producing a microstructure with extremely stable physical properties. The benefits include:
- Increased bending strength and thermal shock resistance
- Longer service life and reduced need for replacement
3. Versatile Applications Across Multiple Forms
Thanks to its exceptional properties, h-BN is also used to manufacture a range of high-temperature ceramic components, including:
- Ceramic rods: For stirring molten materials.
- Ceramic plates, blocks, and crucibles: As high-temperature supports, sintering pads, or melting containers.
- Custom components: High-temperature insulating parts, pouring nozzles, protective sleeves, and more.
These components collectively provide a reliable material solution for environments demanding high-temperature stability, chemical resistance, purity, and electrical insulation.
Primary Applications of BN Evaporation Boats
BN evaporation boats are indispensable in processes requiring extreme material purity, stable operation, and long-lasting performance. Key application areas include:
① Semiconductor and Microelectronics Manufacturing
- Process: Vacuum evaporation deposition of integrated circuits and sensors
- Application: Evaporation of high-purity metals (e.g., aluminum, gold) and functional film layers essential for chip fabrication
② Optics and Display Technology
- Process: Precision optical coatings and conductive film deposition
- Application: Deposition of multi-layer optical films on lenses, lasers, and filters; fabrication of aluminum electrodes and ITO films for displays, ensuring uniformity and purity
③ High-Purity Material Research and Specialized Processing
- Process: Material synthesis under high-temperature, high-purity conditions
- Application: Melting, evaporation, and refining of metals and alloys (aluminum, gold, silver, chromium); purification and crystallization of high-purity substances; inert crucibles and supports for high-temperature glass and crystal production
④ Surface Engineering and Functional Coatings
- Process: Deposition of decorative or functional surface films
- Application: Protective, functional, or aesthetic coatings on tools, consumer goods, and other surfaces
With its combination of chemical inertness, thermal stability, and high purity, the BN evaporation boat is a reliable and mature solution for vacuum evaporation, thin film deposition, and semiconductor manufacturing. INNOVA Supplies provides customized BN evaporation boats in a variety of specifications, supporting high-temperature vacuum processes with professional technical guidance and comprehensive after-sales service. Please contact info@innovasupplies.com if needed.
