Innovasupplies supply the Alumina Porous ceramic disc for Vacuum Chuck, which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on.
Product Properties
Downloads & Resources
| Resource Type | Link |
|---|---|
| Safety Data Sheet (SDS) | 96% Alumina MSDS-Innovacera |
| Catalogue | Porous_Ceramics |
Product Details
Innovasupplies supply the Alumina Porous ceramic disc for Vacuum Chuck, which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on.
Main Application field:
— New and refurbished alumina porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc, dicing saws and grinders.
— 6″, 8,” 12″ are regular sizes, and pore sizes include 15 um, 30 um, 50 um, 100 um.
Materials are alumina (Color: white, light brown, dark brown, blue-gray)
— Custom size (like square, oval shape, or irregular shapes) is available for us.
Characteristics include:
- High flatness and parallelism
- Compact and uniform microstructure with high strength
- Good permeability and uniform adsorption affinity
- Long lifetime
- Dressing easily.
The detailed regular size is as below:
| Regular size | 6, 8, 12 inches | |
| Diameter Regular Tolerance | +/-0.10 mm | |
| Regular Flatness | +/-0.10 mm | |
| Regular Surface Roughness | Ra 0.8-1.6 | |
| Alumina (Al2O3) | Pore Size | Color |
| 15μm | Light Brown | |
| 30μm | Brown | |
| 50μm | Blue-Gray | |
| 100μm | Blue-Gray | |
Frequently Asked Questions
We supply alumina (Al2O3), aluminum nitride (AlN), boron nitride (BN), silicon nitride (Si3N4), zirconia (ZrO2) , beryllia ceramics (BeO), silicon carbide (SiC), boron carbide (B4C), porous ceramics, machinable glass ceramic parts, including crucibles, nozzles, shaft, piston, setter, washer, seals, cutting tool components, insulators, ceramic to metal sealing, metallized ceramics, ceramic heater, ceramic reflector and ceramic filling pump etc.
Key benefits include: extreme hardness, wear/corrosion resistance, high-temperature stability, electrical insulation, and bio-compatibility, ideal for harsh industrial environments.
Yes. We offer CNC machining, ceramic injection molding, cold isostatic pressing, hot pressing, dry pressing and casting to produce non-standard parts based on your drawings or samples.
Different product have different MOQ, if you have mass production in future, we can discuss MOQ again to meet your requirement.
Our products meet ISO 9001:2015 and IATF16949 standards. Material COA (Certificate of Analysis) and mechanical test reports (e.g., hardness, density, flexural strength) are available.
Standard tolerance is ISO2768-M. Precision machining can reach ±0.001mm (depending on material and design).
Standard parts: 1-7 days; Custom parts: 30-60 days (complex designs require additional evaluation).
We use two or three layer protection: : shock-absorbing foam + reinforced cartons or shock-absorbing foam + individual blister boxes + reinforced cartons. Fragile labels are applied for delicate parts.
Yes. Provide your application conditions (temperature/medium/pressure/load), and our engineers will recommend the optimal material solution.
Report the issue within 7 days with photos/videos. Verified defects will be replaced or refunded at no cost.
Yes. Contact our email info@innovasupplies.com to get the more detail about offline orders. For corporate transfers, provide full company name and tax ID for VAT invoice issuance.
Yes, for large orders, we can discussing by offline through email.
Returns are accepted if:
– Received incorrect product model/specification
– Manufacturing defects (non-human damage)
– Unopened packaging & resalable condition (standard parts only)
Claims must be filed within 7 business days after delivery.
Custom orders are non-returnable (unless with critical defects) as they are produced specifically for you. Pre-shipment inspection reports will be provided for approval.
Tours by appointment only. Submit 3 days in advance: company name, visitor position, purpose. Note: Clean-rooms require protective gear.
If you have mass production in future, 1-5 free standard samples are available and you pay the freight cost, custom samples charged at cost.
Related products
$25.00 – $30.00
$25.00
$600.00 – $680.00
$23.00 – $119.90
My History
No products in history.